| GP-20D | KV-3N |
 |
 |
| GP-20D | KV-3N |
|
|
| Œ^Ž® | GP-20D | CRP-500 | KV-3N |
| ƒ‚[ƒ^[o—Í(kw) | 0.2 | 0.75 | 2.2 |
| ”r‹C‘¬“x(‡g/min) | 20 | 500 | 1500 |
| “ž’B^‹ó“x | 1~10-1Pa (8~10-4Torr) |
1~10-3 Torr | 0.7Pa (5~10-3Torr) |
| ‰ñ“]”(rpm) | 1440 | 650 | 500 |
| –û —Ê (‡g) | 0.8 | 4.8 | 5 |
| d—Ê(kg) | 13.5 | 72 | 129 |
| ‹z“üŒû | 14ƒÓ~9.5ƒÓ | 34 | JIS^‹óÌ×ݼÞ50 |
